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Structuralstability of strained Si layers on thin strain-relaxed buffers for high performance MOSFETs

Lookup NU author(s): Dr Enrique Escobedo-Cousin, Dr Sarah Olsen, Professor Steve BullORCiD, Professor Anthony O'Neill

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Author(s): Escobedo-Cousin E, Olsen SH, Bull SJ, O'Neill AG, Coulson H, Claeys C, Loo R, Delhougne R, Caymax M

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 3rd International Silicon-Germanium Device and Technology Meeting (ISTDM 2006)

Year of Conference: 2006

URL: http://www.istdm2006.org/

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