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The Newcastle University research output collection, currently available on ePrints, will shortly be moving to a new open repository platform, Figshare. To prepare for the data migration we have paused adding new content to ePrints, and will resume once the new repository is launched. During this time you will continue to have access to ePrints (but no new content will appear). We will share updates here when available.

Residual Stress Sensor for the Microelectronics Industry

Lookup NU author(s): Dr Alton Horsfall, Sorin Soare, Dr Adrian OilaORCiD, Professor Steve BullORCiD, Professor Nick WrightORCiD, Professor Anthony O'Neill

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Publication metadata

Author(s): dos Santos JMM, Horsfall AB, Soare SM, Oila A, Bull SJ, Wright NG, O'Neill AG, Walton AJ, Gundlach AM, Stevenson JTM

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Eurosensors XVII: the 17th European Conference on Solid-State Transducers

Year of Conference: 2003

Pages: 965-968

Publisher: Elsevier

Series Title: Sensors and Actuators


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