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Residual Stress Sensor for the Microelectronics Industry

Lookup NU author(s): Dr Alton Horsfall, Sorin Soare, Dr Adrian OilaORCiD, Professor Steve BullORCiD, Professor Nick Wright, Professor Anthony O'Neill


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Publication metadata

Author(s): dos Santos JMM, Horsfall AB, Soare SM, Oila A, Bull SJ, Wright NG, O'Neill AG, Walton AJ, Gundlach AM, Stevenson JTM

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Eurosensors XVII: the 17th European Conference on Solid-State Transducers

Year of Conference: 2003

Pages: 965-968

Publisher: Elsevier

Series Title: Sensors and Actuators