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High performance strained Si/SiGe n-channel MOSFETs: impact of alloy composition and layer architecture

Lookup NU author(s): Dr Sarah Olsen, Luke Driscoll, Dr Kelvin Kwa, Dr Sanatan Chattopadhyay, Professor Anthony O'Neill

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Publication metadata

Author(s): Kwa KSK; Olsen SH; Driscoll LS; O'Neill AG; Chattopadhyay S

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: International Conference on Solid State Devices and Materials (SSDM)

Year of Conference: 2003

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