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The relationship between strain generation and relaxation, composition and electrical performance in strained Si/SiGe MOS technology

Lookup NU author(s): Dr Sarah Olsen, Dr Piotr Dobrosz, Professor Steve BullORCiD, Professor Anthony O'Neill

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Publication metadata

Author(s): Olsen SH, Dobrosz P, Bull S, O'Neill A

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: 33rd International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2006)

Year of Conference: 2006

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