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Measurement of the residual strain in strained Si/SiGe using Raman spectroscopy

Lookup NU author(s): Dr Piotr Dobrosz, Professor Steve BullORCiD, Dr Sarah Olsen, Professor Anthony O'Neill


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Publication metadata

Author(s): Bull SJ; Olsen SH; O'Neill AG; Dobrosz P

Publication type: Article

Publication status: Published

Journal: Zeitschrift fuer Metallkunde

Year: 2004

Volume: 95

Issue: 5

Pages: 340-344

ISSN (print): 0044-3093

Publisher: Carl Hanser Verlag GmbH & Co. KG