ePrints

Measurement of the Residual Macro and Microstrain in Strained Si/SiGe using Raman Spectroscopy Z Metal

Lookup NU author(s): Dr Piotr Dobrosz, Professor Steve BullORCiD, Dr Sarah Olsen, Professor Anthony O'Neill

Downloads

Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Dobrosz P, Bull SJ, Olsen SH, O'Neill AG

Publication type: Article

Publication status: Published

Journal: Materials Research Society Symposium Proceedings: High-Mobility Group-IV Materials and Devices

Year: 2004

Volume: 809

Pages: 340-344

ISSN (print): 0272-9172

Publisher: Materials Research Society

URL: http://dx.doi.org/10.1557/PROC-809-B3.4

DOI: 10.1557/PROC-809-B3.4

Altmetrics

Share