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Measurement of the Residual Macro and Microstrain in Strained Si/SiGe using Raman Spectroscopy Z Metal

Lookup NU author(s): Dr Piotr Dobrosz, Professor Steve BullORCiD, Dr Sarah Olsen, Professor Anthony O'Neill


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Publication metadata

Author(s): Dobrosz P, Bull SJ, Olsen SH, O'Neill AG

Publication type: Article

Publication status: Published

Journal: Materials Research Society Symposium Proceedings: High-Mobility Group-IV Materials and Devices

Year: 2004

Volume: 809

Pages: 340-344

ISSN (print): 0272-9172

Publisher: Materials Research Society


DOI: 10.1557/PROC-809-B3.4


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