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Impact of Ge diffusion and wafer cross hatching on strained Si MOSFET electrical parameters

Lookup NU author(s): Luke Driscoll, Dr Sarah Olsen, Dr Sanatan Chattopadhyay, Professor Anthony O'Neill, Dr Kelvin Kwa


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Publication metadata

Author(s): Driscoll LS, Olsen S, Chattopadhyay S, O'Neill AG, Kwa K

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: International Conference on Materials Research Symposium (MRS)

Year of Conference: 2004