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Evolution of strain engineering for Si technology

Lookup NU author(s): Professor Anthony O'Neill, Dr Sarah Olsen, Dr Yuk Tsang, Dr Piotr Dobrosz

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Publication metadata

Author(s): O'Neill AG, Olsen SH, Tsang YL, Dobrosz P

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Unknown

Conference Name: Insulating Films on Semiconductors (INFOS)

Year of Conference: 2006

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